A Study on Shear Wave LiTaO3 Resonators for Viscosity Sensor
A Study on Shear Wave LiTaO3 Resonators for Viscosity Sensor
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粘度传感器剪切波LiTaO3谐振器的研究
DOI：
10.1143/jjap.42.3093
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
N. Wakatsuki
中科院分区：
文献类型：
--
作者：
Mai Bannai;N. Wakatsuki
在MHz频率范围内，研究了剪切波谐振器在标准粘性硅油（粘度9.8 ~ 5040 mPa·s）中的响应特性。测量了4 MHz LiTaO3剪切波谐振器在粒子速度为0.001 ~ 0.3 m/s范围内的共振电阻。测量了片式谐振器在4、8和16 MHz频段的谐振特性。得到了谐振器的等效电路。将剪切波在粘性牛顿流体中的传播理论与等效电路相结合。对石英和PZT的4 MHz剪切波谐振腔进行了测量，并与LiTaO3谐振腔进行了比较。
We examined the response characteristics of a shear wave resonator in standard viscous silicone oil (viscosity 9.8–5040 mPa·s) in the MHz frequency range. The resonance resistances of a 4 MHz LiTaO3 shear wave resonator were measured for the particle velocity from 0.001 to 0.3 m/s. The resonance characteristics of chip-type resonators were also measured for 4, 8 and 16 MHz. The equivalent circuits of the resonators were obtained. The theory of shear wave propagation in viscous Newton fluid was combined with the equivalent circuits. The 4 MHz shear wave resonators of the quartz and the PZT were also measured for comparison with the LiTaO3 resonator.