High Sensitive Gas Sensor Application Based on a Small Defect in Silicon Waveguide
High Sensitive Gas Sensor Application Based on a Small Defect in Silicon Waveguide
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DOI：
10.1109/lpt.2008.2008662
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发表时间：
2009
影响因子：
2.6
通讯作者：
Jun-Hwa Song;N. Zhu
中科院分区：
文献类型：
--
作者：
Jun-Hwa Song;N. Zhu
硅纳米线波导中的小缺陷被应用于气体传感器。具有某些特殊形状和折射率的小缺陷可以与入射光产生强烈的共振，引起较大的损耗。由于硅波导具有空气包层，谐振峰的位置将对环境空气成分的变化敏感。基于该原理的传感器具有很高的灵敏度。作为一个例子，我们监测的共振峰的位置作为空气中的酒精浓度的函数的变化。结果表明，空气中约5 mg/L的乙醇蒸气可使共振波长产生约20 nm的位移。
A small defect in silicon nanowire waveguides is applied for gas sensors. Small defects with some special shapes and indexes can produce strong resonances with the incident light and induce large loss. Since the silicon waveguide has air cladding, the position of resonant peaks will be sensitive for the variation of the ambient air composition. The sensor based on the principle has a high sensitivity. As an example, we monitored the change of the position of the resonance peak as a function of alcohol concentrations in air. Results showed that a ~5-mg/L ethanol vapor in the air can result in a ~20-nm wavelength shift of the resonance.