N.Niwano, M.Suemitsu, Y.Ishibashi, Y.Takeda, and N.Miyamoto: ""Ultraviolet Ozone Oxidation of Si Surface Studied by Photoemission and Surface Infrared Spectroscopy"" J.Vac. Sci. Technol.Vol.A10, No.5. pp.3171-3175 (1992)
N.Niwano, M.Suemitsu, Y.Ishibashi, Y.Takeda, and N.Miyamoto: ""Ultraviolet Ozone Oxidation of Si Surface Studied by Photoemission and Surface Infrared Spectroscopy"" J.Vac. Sci. Technol.Vol.A10, No.5. pp.3171-3175 (1992)
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N.Niwano、M.Suemitsu、Y.Ishibashi、Y.Takeda 和 N.Miyamoto:“通过光电发射和表面红外光谱研究硅表面的紫外臭氧氧化”J.Vac。
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