Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing
Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing
复制标题
用于观察空气退火过程中光学涂层变化的成像散射仪
DOI:
10.1364/oic.2022.thb.3
复制
发表时间:
2022
期刊:
影响因子:
--
通讯作者:
Smith, Joshua R.
中科院分区:
文献类型:
--
作者:
Rezac, Michael;Martinez, Daniel;Gleckl, Amy;Smith, Joshua R.
影响因子:
1.9
作者:
S. Sayah;B. Sassolas;J. Degallaix;L. Pinard;C. Michel;V. Sordini;G. Cagnoli
通讯作者:
G. Cagnoli