A highly-compliant asymmetric 2D guided-mode resonance sensor for simultaneous measurement of dual-axis strain
A highly-compliant asymmetric 2D guided-mode resonance sensor for simultaneous measurement of dual-axis strain
复制标题
高度兼容的非对称二维导模谐振传感器，用于同时测量双轴应变
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
Jeong
中科院分区：
文献类型：
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作者：
S. Foland;Jeong
我们报告的设计，制造和表征的高分辨率双轴应变传感器的基础上导模共振（GMR）在一个二维的，不对称的二氧化钛纳米光栅嵌入在聚二甲基硅氧烷板的表面。该2D GMR传感器中使用的高度顺应性应变感测技术依赖于反射谐振波长的偏移，证明灵敏度为4.8 nm/百分比应变（%ε），可以通过高分辨率光谱仪准确检测，从而提供异常准确的应变测量。据我们所知，这是2D可变形GMR器件的第一次演示，也是这种2D光子应变传感器的第一次演示。
We report the design, fabrication, and characterization of a high-resolution biaxial strain sensor based on guided-mode resonance (GMR) in a two-dimensional, asymmetric titanium dioxide nanograting embedded at the surface of a polydimethylsiloxane slab. The highly-compliant strain sensing technique used in this 2D GMR sensor relies on the shifting of the reflected resonant wavelengths, demonstrating a sensitivity of 4.8 nm/percent strain (%ε), which can be detected accurately by a high resolution spectrometer, thus providing exceptionally accurate strain measurements. To the best of our knowledge, this is the first demonstration of a 2D deformable GMR device, and the first demonstration of a 2D photonic strain sensor of this kind.