Room temperature growth of crystalline Mn-Zn ferrite thin films by laser ablation technique
Room temperature growth of crystalline Mn-Zn ferrite thin films by laser ablation technique
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激光烧蚀技术室温生长晶态锰锌铁氧体薄膜
DOI：
10.1109/20.908630
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发表时间：
2000
期刊：
影响因子：
--
通讯作者：
Y. Matsuo
中科院分区：
文献类型：
--
作者：
M. Nakano;J. Song;H. Fukunaga;Y. Matsuo
一种在Ar气氛中带有荫罩的激光烧蚀技术使我们能够在室温下在玻璃衬底上获得晶态铁氧体薄膜。研究了Ar压强P/subAr/和荫罩与目标的距离L/sub1/。形成锰锌铁氧体尖晶石结构的最佳条件分别为P/subA/r=20mTorr和L/sub1/=20 mm。
A laser ablation technique contained with a shadow mask in Ar atmosphere enables us to obtain crystalline ferrite thin films on glass substrates at room temperature. Investigations on the Ar pressure, P/sub Ar/, and the distance between the shadow mask from the target, L/sub 1/, were carried out. The optimum conditions for forming the spinel structure of Mn-Zn ferrite were P/sub A/r=20 mTorr and L/sub 1/=20 mm, respectively.