Polymer embossing tools for rapid prototyping of plastic microfluidic devices
Polymer embossing tools for rapid prototyping of plastic microfluidic devices
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DOI：
10.1088/0960-1317/14/1/013
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发表时间：
2004-01-01
影响因子：
2.3
通讯作者：
Papautsky, I
中科院分区：
文献类型：
--
作者：
Narasimhan, J;Papautsky, I
在本文中，我们描述了一种使用聚二甲基硅氧烷（PDMS）制造热压花工具的简单而快速的方法，然后将其用于快速制造聚甲基丙烯酸甲酯（PMMA）中的微通道。在 PDMS 铸造过程中，使用硅上的负性光环氧树脂 SU-8 或厚正性光刻胶 A-Z4620 进行成型。这些 PDMS 工具的制造时间比使用传统技术的工具要少得多，并且无论特征的纵横比如何，都保持相同。所描述的方法用于在长径比高达 2 的 PMMA 中压印微通道，深度为 5 至 250 μm，宽度超过 40 gm。该技术还应用于使用多个光刻步骤制造正交 3D 微通道。使用软刀具材料增加了循环时间，并将刀具寿命限制在大约 20 个循环。当快速处理和低成本很重要并且样品数量相对较少时，我们对 PDMS 压花工具的成功演示为快速制作微流控生物芯片原型提供了一种替代方法。
In this paper, we describe a simple and rapid method of fabricating hot embossing tools using polydimethylsiloxane (PDMS), which are then used to rapidly fabricate microchannels in polymethylmethacrylate (PMMA). A negative photoepoxy SU-8 or thick positive photoresist A-Z4620 on silicon was used for molding during PDMS casting. Fabrication time of these PDMS tools was considerably less than those using conventional techniques and remains the same regardless of the aspect ratio of features. The described approach was used to emboss microchannels in PMMA of aspect ratios up to 2, with depths from 5 to 250 mum and widths over 40 gm. The technique was also applied to fabricating orthogonal 3D microchannels using multiple lithography steps. The use of a soft tool material increased cycle time and limited the tool lifetime to approximately 20 cycles. Our successful demonstration of PDMS embossing tools presents an alternative approach for rapidly prototyping microfluidic biochips when fast processing and low cost are important and the number of samples is relatively low.