Fabrication of PDMS stamps for the patterned growth of carbon nanotubes
Fabrication of PDMS stamps for the patterned growth of carbon nanotubes
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DOI：
10.1016/j.mee.2005.01.019
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发表时间：
2005-03-01
影响因子：
2.3
通讯作者：
Cheung, R
中科院分区：
文献类型：
--
作者：
Argyrakis, P;Teo, L;Cheung, R
An anti-adhesion coating technique has been developed for the defect-free release of patterned polydimethylsiloxane (PDMS) stamps. The coating of the anti-adhesion layer involves the use of a C4F8 (octafluorocyclobutane) plasma to deposit a thin fluorocarbon film on the surface of the silicon (Si) print masters in an inductively coupled plasma system. The fabrication method for the defect-free PDMS stamps using the developed anti-adhesion technique will be described. In addition, we present our findings on the characterisation of the deposited fluorocarbon film using Xray photoelectron spectroscopy. It is demonstrated that the fabricated PDMS stamps can be used to print oxidised silicon substrates with a solution-based iron nitrate catalyst for the chemical vapour deposition growth of carbon nanotubes. (c) 2005 Elsevier B.V. All rights reserved.
