Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review
Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review
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DOI：
10.1016/j.snb.2009.10.010
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发表时间：
2010-01-07
影响因子：
8.4
通讯作者：
Milne, W. I.
中科院分区：
文献类型：
--
作者：
Fu, Y. Q.;Luo, J. K.;Milne, W. I.
本文综述了近年来ZnO薄膜在声波微流体和生物传感器中的制备和应用研究进展。高质量和强织构的ZnO薄膜可以使用多种技术制备。其中RF磁控溅射是最常用的。本文回顾了ZnO薄膜的沉积方法，总结了影响沉积ZnO薄膜的微观结构、织构和压电性能的因素。ZnO声波器件可以成功地用作生物传感器，基于高灵敏度的剪切水平和Love波表面声波的生物分子识别，以及薄膜体声波谐振器器件。在ZnO声学器件上产生的声波可以引起显著的声流、小尺度流体混合、泵送、喷射和雾化，这取决于波的模式、振幅和表面条件。基于这些ZnO声波技术的集成实验室芯片诊断系统的潜力也进行了讨论。(C)2009爱思唯尔有限公司版权所有。
Recent developments on the preparation and application of ZnO films for acoustic wave-based microfluidics and biosensors are reviewed in this paper. High quality and strongly textured ZnO thin films can be prepared using many technologies. among which RF magnetron Sputtering is most commonly used. This paper reviews the deposition of ZnO film and Summarizes the factors influencing the microstructure, texture and piezoelectric Properties of deposited ZnO films. ZnO acoustic wave devices can be Successfully used as biosensors, based on the biomolecule recognition using highly sensitive shear horizontal and Love-wave surface acoustic waves, as well as film bulk acoustic resonator devices. The acoustic wave generated on the ZnO acoustic devices can induce significant acoustic streaming, small scale fluid mixing, pumping, ejection and atomization, depending on the wave mode, amplitude and Surface condition. The potential to fabricate an integrated lab-on-a-chip diagnostic system based on these ZnO acoustic wave technologies is also discussed. (C) 2009 Elsevier B.V. All rights reserved.