Modeling and Measuring the Effects of Mutual Impedance on Multi-Cell CMUT Configurations.
Modeling and Measuring the Effects of Mutual Impedance on Multi-Cell CMUT Configurations.
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建模和测量多单元 CMUT 配置上的互阻抗影响。
DOI：
10.1109/ultsym.2010.5936010
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
Wygant,IO
中科院分区：
文献类型：
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作者：
Park,KK;Kupnik,M;Lee,HJ;Khuri-Yakub,BT;Wygant,IO
本文提出了一种计算具有大量单元的CMUT频率响应的数值方法。在CMUT中常见的多单元配置中，每个单元受到来自相邻单元的声学负载的影响。因此，对于多单元CMUT元件的精确模型，最好考虑互声阻抗而不是仅考虑单个单元的声阻抗。我们同时计算每个细胞的速度（板块运动），考虑到互阻抗效应。该模型预测，细胞表现出不同的频率响应，基于它们在元素中的位置。我们使用激光干涉仪，通过测量浸没在植物油中的CMUT的位移响应来验证模型。该器件有169个圆形单元（单晶硅板，500 nm厚，21 μm半径），以六边形单元排列。测量结果与数值计算结果吻合较好。我们的方法的计算时间是显着短于有限元计算。我们的模型可用于寻找优化的细胞配置CMUT在各种应用中，如医学成像和治疗。
This paper presents a numerical method for calculating the frequency response of a CMUT with a large number of cells. In a multi-cell configuration, commonly found in CMUTs, each cell is affected by the acoustic loading from neighboring cells. Thus, for an accurate model of a multi-cell CMUT element it is better to consider the mutual acoustic impedance instead of the acoustic impedance of a single cell only. We calculate the velocity of every cell (plate movement) simultaneously, with the mutual impedance effects taken into account. The model predicts that the cells exhibit different frequency responses, based on their locations in the element. We used a laser interferometer to validate the model by measuring the displacement response of a CMUT immersed in vegetable oil. The device has 169 circular cells (single crystal silicon plates, 500 nm thick, 21 μm radii) placed in a hexagonal cell arrangement. The measurement results agree well with the numerical results. The computation time of our method is significantly shorter than finite element based calculations. Our model can be used for finding optimized cell configurations for CMUTs utilized in various applications such as medical imaging and therapeutic treatment.