The effects of pre-implantation of steel substrates on the structural properties of TiN coatings
The effects of pre-implantation of steel substrates on the structural properties of TiN coatings
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钢基体预植入对TiN涂层结构性能的影响
DOI：
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发表时间：
2008
期刊：
影响因子：
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通讯作者：
M. Milosavljević
中科院分区：
文献类型：
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作者：
D. Peruško;M. Mitrić;V. Milinović;S. Petrović;M. Milosavljević
研究了AISI C1045钢衬底预注氮对TiN涂层组织和显微硬度的影响。注入能量为40keV，注量范围为5×10~(16)~5×10~(17)μ/cm~2，然后用反应溅射方法沉积1.3×10~(-17)离子/厘米~2厚的TiN涂层。用标准入射和掠入射X射线衍射分析、卢瑟福背散射光谱和透射电子显微镜对样品的结构进行了表征。显微硬度测定采用维氏硬度法。当注氮量达到2×10~(17)N/cm~2时，衬底近表面区会形成Fe2N相，注量越高，这种影响越明显。沉积TiN涂层的微观结构强烈依赖于基材的离子束前处理。在非注入衬底上生长的薄膜具有(200)TiN择优取向，而在注入衬底上生长的薄膜具有(111)TiN择优取向。各层择优取向的变化归因于离子注入引起的衬底表面形貌的发展，以及表面晶体结构扭曲和改变的可能影响。离子注入和TiN涂层使这种低性能钢的显微硬度提高了8倍以上。
We have studied the effects of nitrogen pre-implantation of AISI C1045 steel substrates on the microstructure and microhardness of deposited TiN coatings. The substrates were implanted at 40 keV, to the fluences from 5 × 1016 to 5 × 1017 ions/cm2, which was followed by deposition of 1.3-μm thick TiN coatings by reactive sputtering. Structural characterization of the samples was performed by standard and grazing incidence X-ray diffraction analysis, Rutherford backscattering spectroscopy and transmission electron microscopy. Microhardness was measured by the Vicker’s method. Nitrogen implantation up to 2 × 1017 ions/cm2 induces the formation of Fe2N phase in the near surface region of the substrates, which becomes more pronounced for higher fluences. Microstructure of the deposited TiN coatings shows a strong dependence on ion beam pre-treatment of the substrates. The layers grown on non-implanted substrates have a (200) TiN preferential orientation, and those grown on implanted substrates have (111) TiN preferential orientation. The change in preferred orientation of the layers is assigned to a developed surface topography of the substrates induced by ion implantation, and possible effects of distorted and altered crystalline structure at the surface. Ion implantation and deposition of TiN coatings induce an increase of microhardness of this low performance steel for more than eight times.