Injection molding, debinding and sintering of 316L stainless steel microstructures
Injection molding, debinding and sintering of 316L stainless steel microstructures
复制标题
DOI：
10.1007/s00339-005-3273-6
复制
发表时间：
2005-08-01
影响因子：
2.7
通讯作者：
Maeda, R
中科院分区：
文献类型：
--
作者：
Fu, G;Loh, NH;Maeda, R
采用微粉末注射成形技术制备金属微结构。介绍了φ 100 μ m ×高200 μ m和φ 60 μ m ×高191 μ m的316L不锈钢微结构阵列的制备。在常规注射成型机上进行注射成型，并且使用通过深反应离子蚀刻（DRIE）制成的具有垂直侧壁的硅模具嵌件。根据原料特性，选择合适的工艺参数，可获得具有良好微观结构的成型件。然后将成型部件催化脱粘并烧结。在真空下进行不同温度下的烧结。烧结温度的影响进行了评估的基础上抛光和蚀刻的显微照片的烧结显微组织。最后用纳米压痕仪测量了烧结体微观结构的杨氏模量。
The micro powder injection molding (mu PIM) process was used to fabricate metallic microstructures in this paper. The production of 316L stainless steel microstructures arrays with the dimensions of phi 100 mu m x height 200 mu m and phi 60 mu m x height 191 mu m is presented. Injection molding was conducted on a conventional injection molding machine and silicon mold inserts with vertical sidewall made by deep reactive ion etching (DRIE) were used. Molded parts with microstructures were well obtained after selecting suitable processing parameters based on the feedstock characteristics. Then the molded parts were debound catalytically and sintered. Sintering at different temperature was conducted under vacuum. The effects of sintering temperatures were evaluated based on the polished and etched micrographs of the sintered microstructures. Finally Young's Modulus of sintered microstructure was evaluated using nano-indenter.