Humidity resistant MoS2 coatings deposited by unbalanced magnetron sputtering
Humidity resistant MoS2 coatings deposited by unbalanced magnetron sputtering
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DOI：
10.1016/j.surfcoat.2013.07.019
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发表时间：
2013-11
影响因子：
5.4
通讯作者：
B. Vierneusel;T. Schneider;S. Tremmel;S. Wartzack;T. Gradt
中科院分区：
文献类型：
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作者：
B. Vierneusel;T. Schneider;S. Tremmel;S. Wartzack;T. Gradt
MoS 2是一种适用于无氧或水蒸气环境（即真空）的固体润滑剂。潮湿的空气会因氧化而降低薄膜性能，同时伴随着高磨损和摩擦系数的增加。本研究旨在进一步发展溅射纯MoS 2涂层，通过增加对湿度的抵抗力来扩展其对不同环境条件的适用性。通过使用实验Box-Behnken设计与沉积参数的变化阴极电压，目标/基板的距离，温度和氩气压力的支持系统的涂层开发过程。在对比常见的单因素一次（OFAT）的研究，这种方法能够确定沉积工艺参数和摩擦机械MoS 2薄膜性能之间的相互作用。摩擦学改进的重点是最大限度地提高耐磨性在空气和真空中测量球盘实验。评价的机械性能是硬度、弹性模量和残余应力。这些应力由基底曲率法确定。研究表明，薄膜中的残余应力状态和硬度模量比是决定其在潮湿空气和真空环境中摩擦学性能的关键。沉积条件和膜性能之间的关系的详细确定后，一些选定的微观结构分析表明，基本上基本上是基础的取向的晶格磨损有积极的影响，但也会导致各向异性的膜性能，如果发生强烈的冲击或点负荷的涂层裂变断裂。
MoS2is a suitable solid lubricant for environments free of oxygen or water vapor (i.e. vacuum). Humid air degrades film properties due to oxidation accompanied by high wear and increasing coefficients of friction. The present study aims at the further development of sputtered pure MoS2coatings, extending their applicability to varying environmental conditions by increasing the resistance against humidity. The systematic coating development process is supported by using an experimental Box–Behnken design with variations of the deposition parameters cathode voltage, target/substrate distance, temperature and argon gas pressure. In contrast to common one-factor-at-a-time (OFAT) studies, this approach enables a determination of interactions between deposition process parameters and tribological–mechanical MoS2film properties. The tribological improvement focuses on a maximization of wear resistance in air and vacuum measured in ball-on-disk experiments. The evaluated mechanical properties are hardness, elastic modulus and residual stresses. These stresses were determined by the substrate curvature method. The study reveals that the residual stress state in the films and the hardness-to-modulus ratio are crucial for their tribological performance in humid air and vacuum environments. After a detailed determination of the relationships between deposition conditions and film properties, some selected microstructural analyses are presented which show that a substantially basal orientation of the lattice has positive effects on wear but also causes anisotropic film properties which result in fissile fracture of the coating if strong shock or point loads occur.