Suspended graphene arrays for gas sensing applications
Suspended graphene arrays for gas sensing applications
复制标题
DOI：
10.1088/2053-1583/abcf11
复制
发表时间：
2021-04-01
期刊：
影响因子：
5.5
通讯作者：
Migliorato, Max A.
中科院分区：
文献类型：
--
作者：
Gupta, Rakesh K.;Alqahtani, Faisal H.;Migliorato, Max A.
悬浮石墨烯（SUS-G）一直被誉为潜在的“真正的石墨烯”，因为它的导电性能更接近理论石墨烯。然而，迄今为止，在任何器件制造工艺期间的产量的实质性问题严重限制了其使用。我们报告了一个微型9 mm（2）悬浮石墨烯阵列传感器芯片的完全可操作原型的成功制造，该芯片包含64个石墨烯传感器设备，每个设备由180个SUS-G膜组成，其中有56%的石墨烯膜完全完整，用于敏感和选择性气体传感应用。虽然裸传感器芯片可以作为各种气体的敏感气体传感器，例如氨，二氧化氮和一氧化碳，低至ppm/ppb浓度，但对苯二酚功能化的传感器获得对甲醛气体分子的特异性，对乙醇，甲苯和湿度具有有限的交叉敏感性。与具有完全支撑的官能化石墨烯传感器的等效装置不同，官能化SUS-G传感器还可以通过使用UV辅助解吸而不是衬底加热重置到其基线。低功率的紫外线照射并没有显示出严重的损害SUS-G的结构和功能探针的甲醛气体的损失-一个以前未报道的功能。具有大规模可制造性，低功耗和整体尺寸低至1 mm的可重置和选择性甲醛气体传感器阵列将代表电子鼻发展的重要技术进步，用于同时检测多目标气体，具有集成在便携式电子设备和物联网中的潜力。
Suspended graphene (SUS-G) has long been hailed as a potential 'true graphene' as its conductive properties are much closer to those of theoretical graphene. However, substantial issues with yield during any device fabrication process have severely limited its use to date. We report the successful fabrication of a fully operational prototype of a miniature 9 mm(2) suspended graphene array sensor chip, incorporating 64 graphene sensor devices, each comprising of 180 SUS-G membranes with ever reported 56% fully intact graphene membranes for sensitive and selective gas sensing applications. While a bare sensor chip can operate as a sensitive gas sensor for a variety of gasses such as ammonia, nitrogen dioxide and carbon monoxide, down to ppm/ppb concentrations, a tetrafluorohydroquinone functionalized sensor acquires specificity to formaldehyde gas molecules with limited cross-sensitivity for ethanol, toluene and humidity. Unlike an equivalent device with fully supported functionalized graphene sensor, a functionalized SUS-G sensor can be furthermore reset to its baseline by using UV assisted desorption instead of substrate heating. The low power UV irradiation does not show severe damage to the SUS-G structures and loss of functional probes for the formaldehyde gas-a previously unreported feature. A resettable and selective formaldehyde gas sensor array with mass manufacturability, low power consumption and overall dimensions down to 1 mm(2), would represent a significant technological step forward in the development of an electronic nose, for the simultaneous detection of multiple-target gases, with potential for integration in portable electronic devices and the internet of things.