Analysis of micro-object operation based on the dynamics considering the adhesion under an SEM
Analysis of micro-object operation based on the dynamics considering the adhesion under an SEM
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SEM 下基于考虑粘附力的动力学分析微物体运行
DOI：
10.1109/iros.2001.977169
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
T. Onzawa
中科院分区：
文献类型：
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作者：
S. Saito;H. Miyazaki;Tomomasa Sato;Kunio Takahashi;T. Onzawa
构建高性能微型器件需要在扫描电子显微镜（SEM）下以高重复性排列微米尺寸物体的技术。由于微观物体主要通过静电力粘附到其他物体上，因此在微观物体操纵的基础研究中经常考虑粘附力。然而，这些技术仍然没有达到所需的可重复性，因为其中许多技术仅用于经验有效性。有些甚至包括试错的过程。因此，我们通过考虑由球体、针状工具和基底组成的动态系统中的粘附和滚动阻力因素，从理论上分析微观物体的运行。通过此分析，我们表明可以通过适当确定刀具加载角度来选择性地控制系统接触界面的断裂。基于分析，我们还提出了一种在 SEM 下拾取和放置微球操作的实用方法。
Techniques of arranging micrometer-sized objects with high repeatability under a scanning electron microscope (SEM) are required to construct highly functional micro-devices. Since micro-objects tend to adhere to other objects mainly by electrostatic force, the adhesive force is often being considered in basic researches of micro-object manipulation. These techniques, however, still do not achieve the desired repeatability, since many of them are being used just for the empirical effectiveness. Some even include the process of trial-and-error. Thus, we analyze the micro-object operation theoretically by considering the adhesion and rolling-resistance factors in a dynamic system consisting of a sphere, needle-shaped tool, and substrate. Through this analysis, we show that it is possible to control the fracture of the contact interfaces of the system selectively by determining the tool-loading angle appropriately. Based on the analysis, we also propose a practical method for the pick and place operation of a micro-sphere under an SEM.