Back-illuminated CCD for coherent soft X-ray imaging
Back-illuminated CCD for coherent soft X-ray imaging
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用于相干软 X 射线成像的背照式 CCD
DOI：
10.1051/epjap:2008044
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发表时间：
2008
影响因子：
1
通讯作者：
F. Livet
中科院分区：
文献类型：
--
作者：
G. Beutier;G. Laan;A. Marty;F. Livet
直接照明 CCD 由于其良好的空间分辨率和信噪比而在相干 X 射线成像中得到越来越多的应用。这些 CCD 为 3d 过渡金属 L 边缘附近的软 X 射线提供高量子效率。我们比较了前照式和背照式 CCD，并描述了一种获得大动态范围（五个数量级）和高空间分辨率图像的方法。背照式 CCD 可抵抗软 X 射线能量的辐射损伤，并提供真正的 13.5 μm 像素分辨率。在反射几何中的金属多层结构的磁性研究中获得了高质量的衍射图像。
Direct-illumination CCDs find increasing use in coherent X-ray imaging due to their good spatial resolution and signal-to-noise ratio. These CCDs offer a high quantum efficiency for soft X-rays near the 3d transition metal L edges. We compare front- and back-illuminated CCDs and describe a method to obtain images with a large dynamic range (five orders of magnitude) and high spatial resolution. Back-illuminated CCDs are resistant to radiation damage at the soft X-ray energies and provide a true 13.5 μm pixel resolution. High quality diffraction images are obtained in magnetic studies from metallic multilayer structures in reflection geometry.