Active damping of the scanner for high-speed atomic force microscopy
Active damping of the scanner for high-speed atomic force microscopy
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DOI：
10.1063/1.1903123
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发表时间：
2005-05-01
影响因子：
1.6
通讯作者：
Ando, T
中科院分区：
文献类型：
--
作者：
Kodera, N;Yamashita, H;Ando, T
在三维空间中移动样品台的扫描仪是限制原子力显微镜成像速率的关键设备。这种限制主要来自扫描仪在z方向（最频繁的扫描方向）上的共振。共振起源于扫描仪的机械结构以及z压电致动器本身。我们以前证明，起源于结构中的共振可以通过平衡方法最小化。在这里，我们报告说，后者的谐振从致动器可以通过主动阻尼方法消除，其结果是Z扫描器的带宽几乎达到第一谐振频率（150 kHz）的Z压电致动器。(c)2005年美国物理学会。
The scanner that moves the sample stage in three dimensions is a crucial device that limits the imaging rate of atomic force microscopy. This limitation derives mainly from the resonant vibrations of the scanner in the z direction (the most frequent scanning direction). Resonance originates in the scanner's mechanical structure as well as in the z piezoactuator itself. We previously demonstrated that the resonance originating in the structure can be minimized by a counterbalancing method. Here we report that the latter resonance from the actuator can be eliminated by an active damping method, with the result the bandwidth of the z scanner nearly reaches the first resonant frequency (150 kHz) of the z piezoactuator. (c) 2005 American Institute of Physics.