Laser-induced backward transfer of nanoimprinted polymer elements
Laser-induced backward transfer of nanoimprinted polymer elements
复制标题
DOI：
10.1007/s00339-016-9953-6
复制
发表时间：
2016-04-01
影响因子：
2.7
通讯作者：
Eason, Robert W.
中科院分区：
文献类型：
--
作者：
Feinaeugle, Matthias;Heath, Daniel J.;Eason, Robert W.
飞秒激光诱导的透明光聚合物的反向转移证明在固体状态下，由数字激光空间光调制器的辅助下，用于生产成型的存款。通过使用的吸收硅载体基板，我们已经能够成功地转移固相材料，与横向尺寸小到类似6 μ m。此外，包含光子波导浮雕结构的硅载体使得能够转移已完成的压印沉积物，其表面特征与衬底上存在的表面特征完全互补，观察到的最小特征尺寸为140 nm。
Femtosecond laser-induced backward transfer of transparent photopolymers is demonstrated in the solid state, assisted by a digital micromirror spatial light modulator for producing shaped deposits. Through use of an absorbing silicon carrier substrate, we have been able to successfully transfer solid-phase material, with lateral dimensions as small as similar to 6 mu m. In addition, a carrier of silicon incorporating a photonic waveguide relief structure enables the transfer of imprinted deposits that have been accomplished with surface features exactly complementing those present on the substrate, with an observed minimum feature size of 140 nm.