Linear calibration procedure for the phase-to-height relationship in phase measurement profilometry
Linear calibration procedure for the phase-to-height relationship in phase measurement profilometry
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DOI：
10.1016/j.optcom.2007.02.038
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发表时间：
2007-06
影响因子：
2.4
通讯作者：
Paulo J. Tavares;M. Vaz
中科院分区：
文献类型：
--
作者：
Paulo J. Tavares;M. Vaz
高度和相位之间关系的校准对于在相位测量轮廓术中执行精确的 3D 测量至关重要。这项工作报告了解决此问题的不同方法，首先查看此关系的分析表达式并确定边缘分析方法所涵盖的范围。由此确定的结论充分证明了用实验数据的简单归一化程序来面对分析表达式，两个结果之间具有显着的匹配。鉴于此，提出了一种只有一个平面的线性校准程序并进行了实验验证。
Calibration of the relationship between height and phase is of uttermost importance to perform accurate 3D measurements in phase measurement profilometry. This work reports a different approach to this problem by first looking at the analytical expression for this relationship and determining the regime spanned by the fringe analysis method. The conclusions thus ascertained, amply justify confronting the analytical expression with a simple normalization procedure of the experimental data, with a remarkable matching between both results. In light of this, a linear calibration procedure with just one plane is proposed and verified experimentally.