Akihisa Matsuda: "Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphous silicon" Surface Science. 227. 50-56 (1990)
Akihisa Matsuda: "Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphous silicon" Surface Science. 227. 50-56 (1990)
复制标题
Akihisa Matsuda:“氢化非晶硅上甲硅烷基的粘附和损失概率的温度依赖性”表面科学。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: