Hot-iron-metal polishing machine for CVD diamond films and characteristics of the polished surfaces
Hot-iron-metal polishing machine for CVD diamond films and characteristics of the polished surfaces
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DOI：
10.1016/s0257-8972(96)02899-x
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发表时间：
1997
影响因子：
5.4
通讯作者：
M. Yoshikawa;F. Okuzumi
中科院分区：
文献类型：
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作者：
M. Yoshikawa;F. Okuzumi
我们开发了一种技术，使用氢等离子体蚀刻来检查CVD金刚石表面是否存在由抛光引起的损坏层。基于这些结果，我们开发了一种使用热铁金属法抛光切削刀片刃后刀面的装置。此外，我们进行了实验，以检查由上述设备抛光的切削刀片的切削性能。结果如下：（1）金刚石砂轮和金刚石粉末抛光工艺会在CVD金刚石表面形成损伤层，而热铁法不会形成损伤层：（2）用#1500金刚石砂轮抛光CVD金刚石刀片后刀面，再用热铁法抛光前刀面，可以得到具有锋利刃顶的CVD金刚石刀片;（3）以这种方式抛光的CVD金刚石切削刀片适用于镜面精加工切削，并显示出与单晶金刚石刀片一样好的切削性能。
We developed a technique to examine the presence of a damaged layer on a CVD diamond surface, caused by polishing, using etching in hydrogen plasma. Based on the results we developed an apparatus for polishing the flank face of a cutting insert edge using a hot-iron-metal method. Further, we carried out experiments to examine the cutting performance of cutting inserts polished by the above apparatus. The results are the following: (1) diamond wheel and diamond power polishing processes cause a damaged layer on the surface of CVD diamond, while the hot-iron-metal method does not; (2) by polishing the flank face of a CVD diamond cutting insert with a #1500 diamond wheel and polishing the rake face with the hot-iron-metal apparatus we can produce a CVD diamond cutting insert with a sharp edgetop; (3) a CVD diamond cutting insert polished in this way is suitable for mirror-finish cutting and shows a cutting performance which is as good as that of a single crystal diamond insert.