Novel DC-40 GHz MEMS series-shunt switch for high isolation and high power applications
Novel DC-40 GHz MEMS series-shunt switch for high isolation and high power applications
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适用于高隔离度和高功率应用的新型 DC-40 GHz MEMS 串并联开关
DOI：
10.1016/j.sna.2014.04.024
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发表时间：
2014-08-01
影响因子：
4.6
通讯作者：
Huang, Qing-an
中科院分区：
文献类型：
--
作者：
Zhu, Yan-qing;Han, Lei;Huang, Qing-an
本文介绍了一种横向接触串并联欧姆RF微机电系统（MEMS）开关的设计，制造和表征的MEMS驱动器驱动器。由于建议的RF MEMS开关是电热致动的，它可以在0.16 V的极低的工作电压下工作。在这种开关中，两个串联开关级联的四分之一波长段的传输线悬挂在衬底的沟槽，形成一个串并联配置根据阻抗变换的原则。通过使用单个双向热MEMS致动器来控制信号，开关在通过高功率微波信号时提供更高的可靠性。测试结果表明，在DC-40 GHz范围内，插入损耗达到1.2 dB或更好。5 GHz时的隔离度为-50 dB，20 GHz时为-45 dB，35 GHz时为-60 dB。此外，该开关还具有高线性度，以及DC-40-GHz应用的高功率处理。在开关关断状态下，在1 GHz下输入功率高达40 dBm时不会发生自致动。在开关接通状态下，在低于31 dBm的输入功率下，不会观察到由于RF功率引起的触点中的显著插入损耗变化或问题。(C)2014爱思唯尔有限公司版权所有。
This paper presents the design, fabrication, and characterization of a lateral contact series-shunt ohmic RF microelectromechanical systems (MEMS) switch actuated by an electrothermal actuator. Since the proposed RF MEMS switch is actuated electrothermally, it can be operated at an extremely low operation voltage of 0.16 V. In this switch, two series switches are cascaded by a quarter wavelength section of transmission line suspended over the trench of the substrate to form a series-shunt configuration according to the principle of impedance transforming. By using a single bidirectional thermal MEMS actuator to control the signal, the switch provides higher reliability when through high power microwave signal. The measured results show that an insertion loss of 1.2 dB or better is achieved from DC-40 GHz. The isolation is -50 dB at 5 GHz, -45 dB at 20 GHz and -60 dB at 35 GHz. What is more, this switch also exhibits high linearity, and high power handing for DC-40-GHz applications. In the switch OFF state, self-actuation does not happen up to the input power of 40 dBm at 1 GHz. In the switch ON state, no significant insertion loss variations or problems in the contacts, due to the RF power, can be observed below 31 dBm input power. (C) 2014 Elsevier B.V. All rights reserved.