Formation and behaviour of nano/micro-particles in low pressure plasmas
Formation and behaviour of nano/micro-particles in low pressure plasmas
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DOI：
10.1088/0022-3727/39/19/r01
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发表时间：
2006-10
期刊：
影响因子：
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通讯作者：
Y. Watanabe
中科院分区：
文献类型：
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作者：
Y. Watanabe
在硅烷电容高频放电中，对低压等离子体中粒子的形成和行为进行了系统的研究，开发了各种亚纳米以上尺寸范围内的原位粒子生长观察方法。等离子体中粒子的电荷特性和作用在粒子上的力的研究对粒子生长的研究有很大的促进作用。迄今为止观察到的颗粒尺寸和密度的演变有一个共同的特征，即颗粒经过三个阶段长大到微米大小：初始生长阶段到纳米尺寸，快速生长阶段和生长饱和阶段。纳米大小的负电荷粒子和正电荷粒子之间的混凝模型可以很好地解释快速生长和饱和生长阶段的生长。虽然仍有一些问题有待解决，但可以通过考虑气体停留时间与颗粒生长到纳米尺寸的生长时间之间的关系来理解初始生长阶段的生长过程。
Systematic studies on formation and behaviour of particles in low-pressure plasmas have been carried out in silane capacitive high-frequency-discharges developing various in situ particle growth observation methods in the range of their size above sub-nanometres. Studies on charging characteristics of the particles and forces acting on them in the plasmas have greatly contributed to progress in particle growth. All the time evolutions of particle size and density observed until now have a common feature that the particles grow to large ones of micrometres in size through three phases: the initial growth phase up to a nanometre size, the rapid growth phase and the growth saturation phase. The growth in the rapid growth and growth saturation phases can be explained fairly well by the model of coagulation between the negatively charged particles and the positively charged ones of nanometre size. While some issues are still left to be solved, the growth processes in the initial growth phase can be understood by taking into account the relationship between the gas residence time and the growth time for the particles to grow up to nanometre size.