Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces
Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces
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DOI：
10.1103/physrevlett.106.066101
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发表时间：
2011-02-08
影响因子：
8.6
通讯作者：
Aziz, Michael J.
中科院分区：
文献类型：
--
作者：
Madi, Charbel S.;Anzenberg, Eitan;Aziz, Michael J.
我们表明，“溅射图案”的地形不稳定性是由离子碰撞引起的即时原子重新分配的影响，并侵蚀的共识主要原因是基本上无关。我们使用掠入射小角X射线散射测量现场的阻尼噪声或其放大成图案通过线性色散关系。一个模型的基础上的影响引起的重新分配的原子，不溅射的影响解释了所观察到的ultrasmoothening在低角度从正常的入射角和不稳定性在较高的角度。
We show that the "sputter patterning'' topographical instability is determined by the effects of ion impact-induced prompt atomic redistribution and that erosion-the consensus predominant cause-is essentially irrelevant. We use grazing incidence small angle x-ray scattering to measure in situ the damping of noise or its amplification into patterns via the linear dispersion relation. A model based on the effects of impact-induced redistribution of those atoms that are not sputtered away explains both the observed ultrasmoothening at low angles from normal incidence and the instability at higher angles.