Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process
Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process
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DOI：
10.1016/j.sna.2003.10.056
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发表时间：
2004-02-01
影响因子：
4.6
通讯作者：
Schomburg, WK
中科院分区：
文献类型：
--
作者：
Rogge, T;Rummler, Z;Schomburg, WK
研制了一种常闭型压电驱动微阀。由于压电致动弯曲盘的小偏转由PZT制成的液压传动构造，这增加了压电盘的位移高达25倍。阀的切换时间小于1.8 ms。硅凝胶作为液压系统中的过渡介质。它简化了制造过程，并允许灵活适应不同的压力要求，最高可达150 kPa的压差，以300 V切换。此外，这种硅凝胶支持阀门的密封，因此它实现了1：阀的总体尺寸为13 mm × 13 mm × 3 mm，死体积为0.33 μ A，阀座的内径为200 μ m。与微型阀一样小的Transformer能够产生高达300 V的驱动电压，响应时间为2 ms。因此，该阀可以集成到由5-15 V电池供电的手持式系统中。（C）2003 Elsevier B. V.保留所有权利。
A normally-closed piezo-driven micro valve for gases and liquids has been developed. Due to the small deflection of piezo-actuated bending disks made of PZT a hydraulic transmission was constructed, which increases the displacement of the piezo disk up to the 25-fold. The switching times of the valve are shorter than 1.8 ms.Silicone gel serves as a transition medium in the hydraulic. It simplifies the manufacturing process and allows a flexible adaptation to different pressure requirements up to a differential pressure of 150 kPa switched with 300 V. Additionally, this silicone gel supports the sealing of the valve so it achieves an open-to-close ratio of 1: 150,000 or higher.The overall dimensions of the valve are 13 mm x 13 mm x 3 mm, the dead volume is 0.33 muA, and the inner diameter of the valve seat is 200 mum. A transformer as small as the micro valve is able to produce driving voltages of up to 300 V with a response time of 2 ms. Therefore, the valve could be integrated into hand-held systems which are battery powered with 5-15 V. (C) 2003 Elsevier B.V. All rights reserved.