Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches
Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches
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DOI：
10.1126/science.aaz7440
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发表时间：
2020-05-22
期刊：
影响因子：
56.9
通讯作者：
Yin, Peng
中科院分区：
文献类型：
--
作者：
Sun, Wei;Shen, Jie;Yin, Peng
半导体碳纳米管（CNT）的精确制造成密集排列的均匀间隔的阵列是超尺度技术节点所必需的。我们报告的精确缩放的碳纳米管间距使用超分子组装方法称为空间受阻集成的纳米管电子。具体来说，通过使用DNA砖晶体为基础的纳米锐齿排列DNA包裹的碳纳米管通过DNA杂交，我们构建了平行的碳纳米管阵列与均匀间距小至10.4纳米，在一个角度偏差95%。
Precise fabrication of semiconducting carbon nanotubes (CNTs) into densely aligned evenly spaced arrays is required for ultrascaled technology nodes. We report the precise scaling of inter-CNT pitch using a supramolecular assembly method called spatially hindered integration of nanotube electronics. Specifically, by using DNA brick crystal-based nanotrenches to align DNA-wrapped CNTs through DNA hybridization, we constructed parallel CNT arrays with a uniform pitch as small as 10.4 nanometers, at an angular deviation 95%.