Dual chopped photoreflectance spectroscopy for nondestructive characterization of semiconductors and semiconductor nanostructures.

Dual chopped photoreflectance spectroscopy for nondestructive characterization of semiconductors and semiconductor nanostructures.
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DOI:
10.1063/1.2913334
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发表时间:
2008-04
期刊:
The Review of scientific instruments
影响因子:
--
通讯作者:
T. Kita;M. Yamada;O. Wada
T. Kita;M. Yamada;O. Wada
中科院分区:
其他
文献类型:
--
作者:
T. Kita;M. Yamada;O. Wada

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不受光致发光和光散射影响的光反射(PR)光谱已被开发用于对半导体和半导体纳米结构的电子能带结构进行精确表征。泵浦光和探测光的双斩波消除了当通过使用锁定检测系统检测和频或差频分量时信号中包含的意外分量。所获得的PR信号不包含背景,并且被认为是理想的电调制反射率。
Photoreflectance (PR) spectroscopy unaffected by photoluminescence and light scattering has been developed for performing precise characterization of the electronic band structure of semiconductors and semiconductor nanostructures. Dual chopping of both the pump and probe lights eliminates the unexpected components included in the signal when detecting the sum frequency or difference frequency component by using a lock-in detection system. The obtained PR signal contains no background and is considered to be an ideal electromodulated reflectance.