Rapid Temperature Oxidation at SiO2/Si(001) Interface Studied by Real-time X-ray Photoelectron Spectroscopy: Rapid Cooling versus Rapid Heating
Rapid Temperature Oxidation at SiO2/Si(001) Interface Studied by Real-time X-ray Photoelectron Spectroscopy: Rapid Cooling versus Rapid Heating
复制标题
通过实时 X 射线光电子能谱研究 SiO2/Si(001) 界面的快速温度氧化:快速冷却与快速加热
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
and Y. Takakuwa
中科院分区:
文献类型:
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作者:
J. Tang;S. Ogawa;A. Yoshigoe;S. Ishidzuka;and Y. Takakuwa