Influence of target surfaces on the atomic oxygen distribution in the effluent of a micro-scaled atmospheric pressure plasma jet
Influence of target surfaces on the atomic oxygen distribution in the effluent of a micro-scaled atmospheric pressure plasma jet
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DOI：
10.1088/0963-0252/21/2/024007
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发表时间：
2012-04
影响因子：
3.8
通讯作者：
D. Schröder;H. Bahre;N. Knake;J. Winter;T. de los Arcos;V. Schulz-von der Gathen
中科院分区：
文献类型：
--
作者：
D. Schröder;H. Bahre;N. Knake;J. Winter;T. de los Arcos;V. Schulz-von der Gathen
带有反应过程气体（如氧气）的微尺度等离子体射流用于局部表面处理。本文研究了微尺度大气压等离子体射流排放后流出物中原子氧的发展和空间分布。这些测量是通过在流出物中安装各种材料的平面靶来补充的。利用双光子激光诱导荧光光谱技术，从自由流出液中检测到平面前约200 μ m距离处的活性物质。臭氧密度分布是用紫外吸收光谱测量的。研究了废水对金基质和塑料基质的影响，反之亦然。在自由流出液中，原子氧密度在距离喷嘴6mm处呈指数下降至约2 × 1015 cm - 3。塑料目标的实现不会干扰O分布，从而导致目标的严格局部蚀刻。相反，金靶的安装增加了氧的密度，并使其分布在靠近靶的地方。为了建立相关性，用紫外激光显微镜和x射线光电子能谱分析了等离子体处理塑料和金衬底的表面修饰。
Micro-scaled plasma jets with reactive process gases, e.g. oxygen, are applied for localized surface treatment. Here, investigations of the development and the spatial distribution of atomic oxygen are reported in the post-discharge effluent of a micro-scaled atmospheric pressure plasma jet. These measurements are supplemented by installation of planar targets of various materials in the effluent. The reactive species are detected by means of two-photon laser-induced fluorescence spectroscopy from the discharge, through the free effluent, up to distances of about 200 µm in front of a planar surface. Ozone density profiles are measured by UV absorption spectroscopy. The effect of the effluent on gold and plastic substrates and vice versa is investigated. In the free effluent, the atomic oxygen density falls off exponentially to about 2 × 1015 cm−3 at a distance of 6 mm from the jet's nozzle. The implementation of a plastic target does not disturb the O distribution, resulting in a strictly localized etching of the target. In contrast, mounting of a gold target increases the oxygen density and spreads its distribution close to the target. For correlation, surface modifications by plasma treatment of plastic and gold substrates are analysed by UV laser microscopy and x-ray photoelectron spectroscopy.