Superhard conductive carbon nanocrystallite films

Superhard conductive carbon nanocrystallite films
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DOI:
10.1063/1.1435402
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发表时间:
2002-01-21
影响因子:
4
通讯作者:
Kaneko, R
Kaneko, R
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Hirono, S;Umemura, S;Kaneko, R

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已经发现了硬度与钻石相当,但电导率高出19个数量级的碳膜。用电子回旋共振等离子体溅射方法在硅衬底上沉积了薄膜。薄膜的成键结构主要为sp(2)。该薄膜由具有垂直于薄膜表面的平行和弯曲的石墨烯片层的sp(2)纳米晶组成。通过sp(3)键将纳米晶sp(2)与相邻的微晶连接起来,使薄膜具有较高的硬度和导电性。这些SP(2)纳米晶薄膜将有许多应用。(C)2002年美国物理研究所。
Carbon films whose hardness is comparable to diamond's, but whose electrical conductivity is 19 orders of magnitude larger, have been discovered. The films were deposited onto silicon substrates by electron cyclotron resonance plasma sputtering. The bonding structure of the film was mainly sp(2). The film consisted of sp(2) nanocrystallites having parallel and curved graphene sheets vertically oriented to the film surface. The sp(2) nanocrystallites were connected with adjacent crystallites by sp(3) bonding, which gives the film both its high hardness and conductivity. These sp(2) nanocrystallite films will have many applications. (C) 2002 American Institute of Physics.