Scanning thermal-conductivity microscope
Scanning thermal-conductivity microscope
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扫描热导显微镜
DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
R. Grover
中科院分区：
文献类型：
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作者：
D. Sarid;B. McCarthy;R. Grover
本文描述了一种新的原子力显微镜的实现，它可以以高空间分辨率绘制样品的热导特征图。该显微镜采用了单面金属涂层悬臂，它与加热激光一起充当双金属条，加热激光的光束聚焦在悬臂的自由端，在悬臂尖端的相反一侧。减去未加热悬臂梁和加热悬臂梁获得的表面形貌，可以得到样品表面的导热系数图。本文介绍了(A)显微镜的工作原理和(B)在具有氧化物特征的硅样品上所获得的实验结果，两者之间有很好的一致性。
This article describes a novel implementation of an atomic force microscope that can map thermal-conductivity features across a sample with a high spatial resolution. The microscope employs a single-sided, metal-coated cantilever, which acts as a bimetallic strip together with a heating laser whose beam is focused on the cantilever’s free end, on the opposite side of its tip. Subtracting the topography obtained by the unheated and heated cantilevers yields a map of thermal conductivity across the surface of a sample. The article presents (a) the theory of operation of the microscope and (b) the experimental results obtained on a silicon sample with oxide features, showing good agreement between the two.