Direct Laser Writing of Microscale Metal Oxide Gas Sensors from Liquid Precursors
Direct Laser Writing of Microscale Metal Oxide Gas Sensors from Liquid Precursors
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DOI：
10.1021/acsami.2c03561
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发表时间：
2022-06-22
影响因子：
9.5
通讯作者：
Cheng, Huanyu
中科院分区：
文献类型：
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作者：
Castonguay, Alexander C.;Yi, Ning;Cheng, Huanyu
易于图案化和将纳米材料集成到传感器平台中的制造和加工方法具有重要的实用价值和兴趣。在这项工作中，我们报道了使用激光诱导热体素(LITV)直接从金属盐溶液中制造微米级平面气体传感器。LITV提供了一个方便的平台，可以将纳米金属氧化物和混合金属氧化物材料直接集成到加热平台上，可以获得包括许多过渡金属和贵金属在内的各种成分和形貌。LITV独特的图案化和合成灵活性使其能够制造化学和空间上可定制的微型传感器件。我们研究了一组具有代表性的n型和p型LITV沉积金属氧化物及其混合物(CuO、NiO、CuO/ZnO和Fe2O_3/铂)对还原和氧化气体(H_2S、NO_2、NH_3、乙醇和丙酮)的传感性能。这些材料表现出广泛的灵敏度，尤其是NiO对乙醇和丙酮的强烈响应(在250℃时分别为407和301%R/R0)，同时CuO/ZnO对纯CuO上测量的所有气体的灵敏度提高了5-20倍，突出了LITV在制造混合材料微型传感器方面的机会。
Fabrication and processing approaches that facilitate the ease of patterning and the integration of nanomaterials into sensor platforms are of significant utility and interest. In this work, we report the use of laser-induced thermal voxels (LITV) to fabricate microscale, planar gas sensors directly from solutions of metal salts. LITV offers a facile platform to directly integrate nanocrystalline metal oxide and mixed metal oxide materials onto heating platforms, with access to a wide variety of compositions and morphologies including many transition metals and noble metals. The unique patterning and synthesis flexibility of LITV enable the fabrication of chemically and spatially tailorable microscale sensing devices. We investigate the sensing performance of a representative set of n-type and p-type LITV-deposited metal oxides and their mixtures (CuO, NiO, CuO/ZnO, and Fe2O3/Pt) in response to reducing and oxidizing gases (H2S, NO2, NH3, ethanol, and acetone). These materials show a broad range of sensitivities and notably a strong response of NiO to ethanol and acetone (407 and 301% R/R0 at 250 degrees C, respectively), along with a 5- to 20-fold sensitivity enhancement for CuO/ZnO to all gases measured over pure CuO, highlighting the opportunities of LITV for the creation of mixed-material microscale sensors.