Optical Photothermal Infrared Microspectroscopy with Simultaneous Raman - A New Non-Contact Failure Analysis Technique for Identification of <10 μm Organic Contamination in the Hard Drive and other Electronics Industries.
Optical Photothermal Infrared Microspectroscopy with Simultaneous Raman - A New Non-Contact Failure Analysis Technique for Identification of <10 μm Organic Contamination in the Hard Drive and other Electronics Industries.
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DOI：
10.1017/s1551929520000917
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发表时间：
2020-05
期刊：
影响因子：
--
通讯作者：
Kunkel G
中科院分区：
文献类型：
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作者：
Kansiz M;Prater C;Dillon E;Lo M;Anderson J;Marcott C;Demissie A;Chen Y;Kunkel G
光学光热红外光谱(O-PTIR)是一种测量亚微米空间分辨率红外光谱的新技术。通过深入了解开发期间和生产线上发生的工艺污染，这加快了分析时间，使大批量制造商受益。快速获得高空间分辨率的远场非接触红外光谱的能力有助于化学识别无法用传统傅立叶变换红外(FT-IR)显微光谱测量的微小有机污染物。独特的泵浦-探测系统结构也使亚微米级的同时红外+拉曼显微镜能够在同一地点以相同的空间分辨率进行。凭借这些独特的能力，O-PTIR正在高容量和高价值的高科技零部件(内存存储、电子产品、显示器等)行业中得到利用。
Optical Photothermal Infrared (O-PTIR) spectroscopy is a new technique for measuring submicron spatial resolution IR spectra with little or no sample preparation. This speeds up analysis times benefiting high-volume manufacturers through gaining insight into process contamination that occurs during development and on production lines. The ability to rapidly obtain far-field non-contact IR spectra at high spatial resolution facilitates the chemical identification of small organic contaminants that are not possible to measure with conventional Fourier transform infrared (FT-IR) microspectroscopy. The unique pump-probe system architecture also facilitates submicron simultaneous IR + Raman microscopy from the same spot with the same spatial resolution. With these unique capabilities, O-PTIR is finding utilization in the high-volume and high-value industries of high-tech componentry (memory storage, electronics, displays, etc.).