Properties of electron field emitters prepared by selected area deposition of CVD diamond carbon films
Properties of electron field emitters prepared by selected area deposition of CVD diamond carbon films
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DOI：
10.1016/s0925-9635(99)00262-9
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发表时间：
2000-04-01
影响因子：
4.1
通讯作者：
Lin, IN
中科院分区：
文献类型：
--
作者：
Fox, NA;Youh, MJ;Lin, IN
采用两种不同的方法在硅衬底上成功地实现了金刚石薄膜的选区沉积。在第一种情况下，采用图案化SiO2层的标准剥离技术用作掩模，并且在第二种情况下，商业喷墨打印机技术适于用于将金刚石纳米砂砾种到硅上。通过CVD生长在图案化SiO2/Si衬底上形成直径约5.6 μ m的图案化掺硼金刚石垫，发现其由尺寸约为250-800 nm的紧密堆积的碳簇组成，每个碳簇中嵌入有50 nm的颗粒。通过喷墨印刷播种的图案化金刚石膜在CVD生长后用原位硼掺杂形成，点（直径85 μ m）包含纳米范围内的多晶。通过拉曼和扫描电子显微镜（SEM）分析表征所得图案化金刚石膜，然后将其配置为冷阴极场发射体以确定其电子发射性能。结果表明，图案化的金刚石薄膜喷墨印刷生产提供了一个更简单的方法，用于制造平面金刚石发射极阵列的场发射和导电性能，可以定制，以提高性能和制造成本的冷保持发射器在国家的最先进的场发射显示器。(C)2000 Elsevier Science S.A，版权所有。
Selected area depositions (SAD) of diamond films were successfully achieved on silicon by two different approaches. In the first case, a standard lift-off technique employing a patterned SiO2 layer was used as a mask, and in the second case commercial ink-jet printer technology was adapted to be used to seed diamond nano-grit onto silicon. Patterned, boron-doped diamond pads roughly 5.6 mu m in diameter were formed by CVD growth on patterned SiO2/Si substrates and found to be composed of closely packed carbon clusters approximately 250-800 nm in size each containing 50-nm particles embedded in them. The patterned diamond film seeded by ink-jet printing formed after CVD growth with in situ boron-doping, dots (85 mu m in diameter) containing poly-crystals in the nanometre range. The resulting patterned diamond films were characterised by Raman and scanning electron microscope (SEM) analysis and then configured as cold cathode field emitters to determine their electron emission performance. The results suggest that patterned diamond films produced by ink-jet printing offer a simpler method for fabricating planar diamond emitter arrays with field emission and conduction properties which could be tailored to improve the performance and fabrication cost of cold held emitters in state-of-the-art field emission displays. (C) 2000 Elsevier Science S.A, All rights reserved.