Room-temperature THz antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna
Room-temperature THz antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna
复制标题
室温太赫兹天线耦合微测辐射热计，半波天线中心带有焦耳热电阻
DOI：
10.1109/irmmw-thz.2014.6956173
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
H. Inokawa
中科院分区：
文献类型：
--
作者：
N. Hiromoto;A. Tiwari;M. Aoki;H. Satoh;M. Takeda;H. Inokawa
我们提出并制造了一种天线耦合微测辐射热计，在硅基板上的半波天线中心具有焦耳加热电阻，以实现室温下 1 THz 频率区域的高性能传感。加热器中央直接连接半波天线，热敏电阻通过绝缘薄膜与加热器热接触但电隔离，从而可以独立优化加热器和热敏电阻的阻抗。使用1 THz源的性能测量证明了辐射热测量计通过接收天线检测太赫兹波，该结构具有实现高性能室温太赫兹探测器的优势。
We have proposed and fabricated an antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna on a Si substrate to achieve a high-performance sensing in 1 THz frequency region at a room-temperature. The heater is directly connected to a half-wave antenna at its center and the thermistor is thermally contacted to but electrically isolated from the heater by a thin insulator film, by which the impedances of heater and thermistor can be optimized independently. The performance measurements using a 1 THz source has proved the bolometer detects the THz wave by the receiving antenna and this structure has the advantage in realizing high-performance room-temperature THz detectors.