Flexible Printed Circuit Board as Novel Electrodes for Acoustofluidic Devices
Flexible Printed Circuit Board as Novel Electrodes for Acoustofluidic Devices
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DOI：
10.1109/ted.2020.3039760
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发表时间：
2020-11
影响因子：
3.1
通讯作者：
Chao Sun;R. Mikhaylov;Yongqing Fu;Fangda Wu;Hanlin Wang;Xichen Yuan;Zhihua Xie;Dongfang Liang;Zhenlin Wu;Xin Yang
中科院分区：
文献类型：
--
作者：
Chao Sun;R. Mikhaylov;Yongqing Fu;Fangda Wu;Hanlin Wang;Xichen Yuan;Zhihua Xie;Dongfang Liang;Zhenlin Wu;Xin Yang
基于表面声波的声流体学在生物医学和化学领域有着广泛的应用。SAW器件的传统制造工艺使用光刻和金属沉积，因此需要使用洁净室设施。本研究提出了一种基于柔性印刷电路板（FPCB）的高效、通用的声流器件开发技术。通过机械夹紧在FPCB上制作的数字间电极（ide）到压电基板上，可以有效地产生saw，并附带一个额外的匹配网络。用激光测振仪测量声表面波振幅，其振幅随输入电压的增加而增大。FPCB-SAW器件已被应用于驱动10- $\mu \text{m}$微球在液滴内部形成强大的流涡，并驱动在基板表面运输的无底液滴。使用FPCB而不是刚性印刷电路板（PCB）可以帮助减少设备的整体占地面积并节省空间。装配FPCB-SAW器件的低要求可以通过提供快速原型设备来促进多种声流应用。
Surface acoustic wave (SAW)-based acoustofluidics shows broad applications in biomedicine and chemistry. Conventional manufacturing process for SAW devices uses photolithography and metal deposition, thus requires accessing cleanroom facilities. This study presents an efficient and versatile technique based on a flexible printed circuit board (FPCB) for developing SAW acoustofluidic devices. By mechanically clamping interdigital electrodes (IDEs) made on the FPCB onto a piezoelectric substrate, SAWs can be effectively generated with an additional matching network. The SAW amplitudes were measured by a laser vibrometer, which increases with the applied input voltage. The FPCB-SAW device has been applied to actuate 10- $\mu \text{m}$ microspheres to form strong streaming vortices inside a droplet, and to drive a sessile droplet for transportation on the substrate surface. The use of the FPCB rather than a rigid printed circuit board (PCB) can help cut down on the overall footprint of the device and save space. The low requirement in assembling the FPCB-SAW device can facilitate versatile acoustofluidic applications by providing fast prototyping devices.