Displacement measurement by the detection of contrast variation of a projected pattern

Displacement measurement by the detection of contrast variation of a projected pattern
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通过检测投影图案的对比度变化来测量位移

DOI:
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发表时间:
1993
期刊:
Optics & Photonics
影响因子:
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通讯作者:
Tsutomu Furuki
Tsutomu Furuki
中科院分区:
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文献类型:
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作者:
T. Yoshizawa;Y. Otani;Akiyoshi Tochigi;Tsutomu Furuki

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开发并测试了一种光学非接触式位移测量系统。该系统由光源、物镜透镜、四象限光栅和四象限光电二极管组成。该原理是基于检测作为散焦函数的投影象限图案的对比度变化。该系统的投影轴和观察轴同轴,几乎不受物体表面颜色和倾斜度的影响。位移的方向可以通过使用一对检测器来识别。实验测试验证了该方法的原理,并在实际应用中对系统进行了测试,取得了预期的效果。
A system has been developed and tested for optical noncontact measurement of displacement. The system consists of a light source, an objective lens, a quadrant pattern and a quadrant photodiode. The principle is based on the detection of the contrast variation of the projected quadrant pattern as a function of defocus. This system has coaxial projection and observation axes and is hardly influenced by the color and inclination of the surface. The direction of displacement can be identified by using one pair of detectors. Experimental tests verify the principle of the method and some tests of the system in applications are tried with expected results.