Highly reflective visible color filter based on a double layer TiO2 subwavelength structure
Highly reflective visible color filter based on a double layer TiO2 subwavelength structure
复制标题
DOI：
10.1364/ome.433431
复制
发表时间：
2021-08
影响因子：
2.8
通讯作者：
Y. Takashima;M. Haraguchi;Y. Naoi
中科院分区：
文献类型：
--
作者：
Y. Takashima;M. Haraguchi;Y. Naoi
基于全电介质亚波长结构 (SWS) 的滤色镜可以在生产过程中精确控制着色。然而，SWS 制造通常需要复杂的工艺，例如剥离或蚀刻。在这里，使用双层高对比度全电介质 SWS 实验演示了无需剥离和蚀刻技术制造的高反射滤色镜。 SWS 使用电子束光刻和蒸发技术在光学玻璃基板上制造。通过调整结构参数来控制可见反射光谱。实验证明红色、绿色和蓝色的反射率分别为 57%、63% 和 72%。高反射率、制造产量和制造的滤光片颜色的控制水平使其适合成像、显示和传感应用。
Color filters based on all-dielectric subwavelength structures (SWSs) allow precise control of the coloration during production. However, SWS manufacturing typically requires complex processes, such as lift-off or etching. Here, highly reflective color filters manufactured without lift-off and etching techniques were experimentally demonstrated using a double-layer high-contrast all-dielectric SWS. The SWSs were fabricated on optical glass substrates using electron beam lithography and evaporation. Visible reflection spectra were controlled by adjusting structural parameters. Red, green, and blue colorations were experimentally demonstrated with 57%, 63%, and 72% reflectivities, respectively. High reflectivity, manufacturing throughput and level of control of the manufactured filter color make them suitable for imaging, display, and sensing applications.