Electron extraction electrode for a high-performance electron beam from carbon nanotube cold cathodes
Electron extraction electrode for a high-performance electron beam from carbon nanotube cold cathodes
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DOI：
10.1116/1.4978045
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发表时间：
2017-03-01
影响因子：
1.4
通讯作者：
Park, Kyu Chang
中科院分区：
文献类型：
--
作者：
Kang, Jung Su;Park, Kyu Chang
采用垂直排列的碳纳米管发射极作为冷阴极，研究了电子引出电极对高性能电子束电子发射的影响。对于较低的电子发射区（阳极电流小于1 mA），栅电极结构和所用材料对电子发射电流的影响很小。然而，在较高的电子发射状态（阳极电流高于1 mA）下，栅电极材料和结构确实开始由于栅电极上的热和静电负载而偏离理想的Fowler-Nordheim图，特别是对于小的阴极面积。栅极网格在较高电流负载下向上弯曲，这随后增加栅极漏电流。栅网电极的向上弯曲可以通过增加栅到阴极的距离来降低有效电场，导致电子发射电流饱和。对于阳极上较高的电子发射电流，包括较低热膨胀系数材料的栅电极适合于小阴极面积的电子束。(C)2017年美国真空学会。
The effect of an electron extraction electrode on electron emission for a high-performance electron beam was studied using vertically aligned carbon nanotube emitters as a cold cathode. For the lower electron emission regime (anode current less than 1mA), the gate electrode structure and materials used had little effect on the electron emission current. However, at the higher electron emission regime (anode current higher than 1mA), the gate electrode materials and structure do begin to deviate from an ideal Fowler-Nordheim plot by the thermal and electrostatic load on the gate electrode, especially for the small cathode area. The gate mesh bends upward under a higher current load, which then increases the gate leakage current. The upward bending in the gate mesh electrode could reduce the effective electric field by increasing the gate to cathode distance, resulting in saturation of the electron emission current. For higher electron emission currents on the anode, a gate electrode comprising a lower thermal expansion coefficient material is suitable for small cathode area electron beams. (C) 2017 American Vacuum Society.