Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography
Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography
复制标题
通过立体光刻制造三维微集成流体系统（MIFS）
DOI：
10.1109/memsys.1994.555588
复制
发表时间：
1994
期刊：
影响因子：
--
通讯作者：
T. Ogata
中科院分区：
文献类型：
--
作者：
K. Ikuta;K. Hirowatari;T. Ogata
作者提出并论证了一种采用微立体光刻和电镀的新型真三维微细加工技术--“IH工艺”。该工艺既适用于聚合物微结构，也适用于金属微结构。在本文的第一部分，讨论了一种新型的微集成流体系统，其概念是将传统的硅工艺和新的IH工艺相结合的混合系统。成功地制作了一台三维MIFS的样机。其次，作者开发了一种特殊的导电紫外光固化聚合物，并用它制作了一种采用IH工艺的静电微驱动器。第三，对微观凝固过程进行了详细的观察，提出了微观凝固过程的理论模型。基于该模型的仿真结果与实验结果吻合较好。
A new type of real three dimensional micro fabrication using micro stereo lithography and electro plating named the "IH process" has been proposed and demonstrated by the authors. This process is applicable to both polymer and metal microstructures. In the first part of this paper, a new type of micro integrated fluid system (MIFS) whose concept is a hybrid system combined with the conventional silicon process and the new IH process are discussed. A three dimensional MIFS is prototyped successfully. Secondly, a special conductive UV solidified polymer is developed by the authors, together with an electrostatic microactuator made of it by using the IH process. The thirdly, the micro solidification process is carefully observed and a theoretical model of this process is proposed. The simulation results based on this model show good agreement with the experimental results.