Experimental study on chemical mechanical polishing of chalcogenide glasses.
Experimental study on chemical mechanical polishing of chalcogenide glasses.
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DOI：
10.1364/ao.58.001950
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发表时间：
2019-03
期刊：
影响因子：
1.9
通讯作者：
Dongbai Xue;Peng Wang;Lingyan Jiao;Weihao Li;Yi-qin Ji
中科院分区：
文献类型：
--
作者：
Dongbai Xue;Peng Wang;Lingyan Jiao;Weihao Li;Yi-qin Ji
硫系玻璃（Ge_（10）As_（40）Se_（50））是红外无热化光学系统的核心部件之一。由于材料特性，其加工性能受到限制，表面缺陷难以控制。Ge 10As 40 Se 50的化学性质已经确定，它可以与氢氧化钠和过氧化氢（H2 O2）反应。本文进一步进行了实验研究，探讨了化学机械抛光对表面的影响。结果表明，两种表面处理剂均能有效地改善表面质量.当H_2O_2浓度为10 wt. %至15 wt. %时，表面微观缺陷和表面粗糙度均得到明显改善，表面粗糙度RMS为<$0.31 nm。
Chalcogenide glasses (Ge10As40Se50) are one of the core components of the athermalized infrared optical system. Because of material properties, its processability is limited, and surface defects are difficult to control. The chemical nature of Ge10As40Se50 has been established, which can react with sodium hydroxide and hydrogen peroxide (H2O2). In this paper, experimental studies are further carried out to investigate the effect of chemical-mechanical polishing on the surface. As a result, both agents can improve the surface quality effectively. When the concentration of H2O2 is about 10 wt. % to 15 wt. %, the best result can be obtained, in which case the surface microdefect and surface roughness are significantly improved with the surface roughness RMS≈0.31 nm.