Shape Memory Alloy Actuators for Silicon Microgrippers
Shape Memory Alloy Actuators for Silicon Microgrippers
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DOI：
10.1109/jmems.2019.2936288
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发表时间：
2019-10-01
影响因子：
2.7
通讯作者：
Dietzel, Andreas
中科院分区：
文献类型：
--
作者：
Garces-Schroeder, Mayra;Zimmermann, Tom;Dietzel, Andreas
介绍了通过飞秒激光烧蚀制造形状记忆合金镍钛执行器的方法。检查加工参数，并通过电子显微镜和差示扫描量热法评估烧蚀过程对形状记忆材料性能的影响。结果表明，已经建立了一种有效的烧蚀过程，对执行器材料的形状记忆特性的影响可以忽略不计，每个执行器的切割时间约为 3 分钟。研究了两种不同的执行器几何形状，并通过测量执行器行程、力和阻力特性来比较它们的性能。提出了一种用于稳定电阻的预处理程序，允许基于固有传感器效应进行执行器控制。描述了执行器到硅微夹具的晶圆级集成过程。
The fabrication of shape memory alloy NiTi actuators by femtosecond laser ablation is presented. Processing parameters are examined and the effect of the ablation process on the shape memory material properties is assessed by electron microscopy and differential scanning calorimetry. It is shown that an efficient ablation process with negligible effect on the shape memory properties of the actuator material has been established with a cutting time of similar to 3 min per actuator. Two different actuator geometries are studied and their performances are compared by measurements of actuator stroke, force and resistance characteristics. A preconditioning procedure for stabilization of the resistance is presented, permitting an actuator control based on the intrinsic sensor effect. A wafer-level integration process of the actuators into silicon microgrippers is described.