Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range.
Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range.
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适用于极紫外范围的铍基多层反射镜和滤光片
DOI：
10.1166/jnn.2019.16474
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发表时间：
2019
影响因子：
--
通讯作者：
Zuev Sergey
中科院分区：
文献类型：
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作者：
Chkhalo Nikolay;Lopatin Alexey;Nechay Andrey;Pariev Dmitriy;Pestov Alexey;Polkovnikov Vladimir;Salashchenko Nikolay;Schäfers Franz;Sertsu Mewael;Sokolov Andrey;Svechnikov Mikhail;Tsybin Nikolay;Zuev Sergey
本文介绍了在极紫外光谱范围内，铍作为多层膜反射镜(MLM)和透射式滤光片(TF)材料的首次系统研究结果。这项研究的目的是需要提高MLMS的反射率和光谱分辨率，以研究太阳的日冕。我们研究了Mo/Be(工作波长为13.2 nm)、Be/Al和Be/Si/Al(17.1和30.4 nm)多层膜以及自支撑Be膜。结果表明，含Be的MLM具有明显的反射率优势，但其光谱通带与不含Be的MLM相近。对20个月的MLMS的观测没有发现反射系数有任何明显的下降。解释了硅中间层对Be/Al MLM反射率的影响。对厚度为160 nm的自立式铍滤光片的研究表明，其机械强度与相同厚度的铝滤光片的机械强度大致相同。透过率也有很高的稳定性。
This paper presents the first results of systematic studies of beryllium as a material for multilayer mirrors (MLM) and transmission filters (TF) for the EUV spectral range. The objective for the study is the need for the increase in reflectivity and spectral resolution of MLMs for studying the Sun’s corona. We investigated Mo/Be (working wavelength is 13.2 nm), Be/Al and Be/Si/Al (17.1 and 30.4 nm) multilayers, as well as free-standing Be films. It was shown that the Be-containing MLMs have significant advantage in reflectivity while their spectral pass-band is similar to beryllium-free MLMs. Observation of the MLMs in the course of 20 months has not revealed any significant decrease in the reflection coefficient. Effect of the silicon interlayers on reflectance of Be/Al MLM is explained. Investigation of a free-standing beryllium filter of the 160 nm thickness showed that its mechanical strength is approximately at the same level as that of the aluminum filter with the same thickness. There is also high stability of the transmittance.