Industrial applications of laser micromachining
Industrial applications of laser micromachining
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DOI：
10.1364/oe.7.000056
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发表时间：
2000-07-17
期刊：
影响因子：
3.8
通讯作者：
Gower, MC
中科院分区：
文献类型：
--
作者：
Gower, MC
介绍了脉冲激光器在多个制造行业中对材料进行微加工的用途。回顾了微孔、喷墨打印机喷嘴和生物医学导管钻孔、薄膜划线和微机电系统 (MEMS) 制造应用。 (C)2000 美国光学学会。
The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electromechanical system (MEMS) fabrication applications are reviewed. (C)2000 Optical Society of America.