Dynamically Balanced Folded-Beam Suspensions for Resonators
Dynamically Balanced Folded-Beam Suspensions for Resonators
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DOI：
10.1109/jmems.2015.2454593
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发表时间：
2015-12-01
影响因子：
2.7
通讯作者：
Elata, David
中科院分区：
文献类型：
--
作者：
Shmulevich, Shai;Elata, David
标准折叠梁悬架常用于静电梳齿驱动谐振器，其目的是实现系统的线性响应。然而，我们发现标准折梁悬架的简谐响应在系统的基本共振频率处是非线性的。具体地说，在基本共振频率下，悬架的刚度随运动幅度的增大而单调增加。我们表明，即使悬架的目的是作为线性弹簧响应，它实际上是设计为仅在静态载荷下这样做。我们提出了一种新的动平衡折梁悬架的形式来解决这个问题。这种悬架的设计是这样的：在系统的基频，它的响应是线性的，它的刚度不受运动的影响。设计这种悬架的方法是完全详细的。我们通过实验证明了新设计的可行性。[2015-0128]
The standard folded-beam suspension is often used in electrostatic comb-drive resonators with the intention of achieving a system with a linear response. However, we show that the harmonic response of the standard folded-beam suspension is not linear at the fundamental resonance frequency of the system. Specifically, we show that at the fundamental resonance frequency, the stiffness of the suspension increases monotonically with increasing motion amplitude. We show that even though the suspension is intended to respond as a linear spring, it is actually designed to do so only in static loading. We present a solution to the problem in the form of a new dynamically balanced folded-beam suspension. This suspension is designed such that at the fundamental frequency of the system, its response is linear, and its stiffness is unaffected by motion. The methodology for designing this suspension is fully detailed. We experimentally demonstrate the viability of the new design. [2015-0128]