Effects of Rotation on Heat Flow, Segregation, and Zone Shape in a Small-scale Floating-zone Silicon Growth under Axial and Transversal Magnetic Fields

Effects of Rotation on Heat Flow, Segregation, and Zone Shape in a Small-scale Floating-zone Silicon Growth under Axial and Transversal Magnetic Fields
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轴向和横向磁场下小型浮区硅生长中旋转对热流、偏析和区形状的影响

DOI:
10.3970/fdmp.2005.001.033
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发表时间:
2005
期刊:
影响因子:
--
通讯作者:
B. Yeh
B. Yeh
中科院分区:
--
文献类型:
--
作者:
C. Lan;B. Yeh

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在浮区晶体生长中,用磁场抑制不稳定的Marangoni对流作为一种可靠而有用的策略,近年来得到了广泛的应用。磁场的横向方向是特别有效的,但不对称的区域形状和因此引起的偏析。进料和晶体棒的反向旋转是改善掺杂剂均匀性的常用方法。然而,它在磁场下的作用是复杂的,尚未得到详细的研究。在本分析中,使用基于有限体积/多重网格方法的三维(3D)模拟来说明旋转对轴向和横向磁场下的小规模浮区硅生长的热流、掺杂剂偏析和区形状的影响。晶体的导电性的作用也被考虑在内。关键词:旋转,对流,偏析,磁场,洛仑兹力,浮区法。
The suppression of unstable Marangoni convection in floating-zone crystal growth by magnetic fields has enjoyedover recent years a widespread use as a reliableand useful strategy. A transversal directionof the field is particularly efficient, but asymmetric zone shapes and thussegregation are induced. Counter-rotationof the feed and of the crystal rods is a common way to improve dopant homogeneity. However, its effects under mag- netic fields are complex and have not yet been studied in detail. In the present analysis, three-dimensional (3D) simulations based on a finite-volume/multigrid method are used to illustrate the effects of rotation on the heat flow, dopant segregation, and the zone shape for a small- scale floating-zone silicon growth under both axial and transversal magnetic fields. The role of electrical con- ductivity of the crystal is also taken into account. keyword: Rotation, Convection, Segregation, Mag- netic field, Lorentz force, Floating-zone method.
一些广泛使用的材料过程中的热毛细管流动和相变
DOI: --
发表时间: 2005
期刊: Fluid dynamics and material processing 1
影响因子: --
作者:
Gustav Amberg;Junichiro Shiomi
通讯作者: Junichiro Shiomi