Design of apodized hydrogenated amorphous silicon grating couplers with metal mirrors for inter-layer signal coupling: Toward three-dimensional optical interconnection
Design of apodized hydrogenated amorphous silicon grating couplers with metal mirrors for inter-layer signal coupling: Toward three-dimensional optical interconnection
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DOI：
10.7567/jjap.54.04dg04
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发表时间：
2015-04
影响因子：
1.5
通讯作者：
Y. Kuno;Joonhyun Kang;Y. Hayashi;Jun-ichi Suzuki;T. Amemiya;N. Nishiyama;S. Arai
中科院分区：
文献类型：
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作者：
Y. Kuno;Joonhyun Kang;Y. Hayashi;Jun-ichi Suzuki;T. Amemiya;N. Nishiyama;S. Arai
针对氢化非晶硅(a-Si：H)多层光波导层间耦合问题，提出了一对夹杂金属反射镜的变迹结构的光栅耦合器。我们从理论上证明，即使在几微米的层间距范围内，引入变迹光栅耦合器也能产生约90%的高耦合效率。此外，通过调整光栅周期，在较大的带宽范围内获得了高的耦合效率。
A pair of grating couplers with apodized structure, sandwiched by metal mirrors, was proposed for inter-layer coupling between multilayer waveguides based on hydrogenated amorphous silicon (a-Si:H). We proved theoretically that the introduction of an apodized grating coupler yields a high coupling efficiency of about 90% even for an inter-layer distance of several micrometers. In addition, this high coupling efficiency was obtained for a large bandwidth by adjusting the grating period.