Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line
Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line
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DOI：
10.1016/j.sna.2016.01.043
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发表时间：
2016-04-01
影响因子：
4.6
通讯作者：
Tanaka, Shuji
中科院分区：
文献类型：
--
作者：
Asano, Sho;Muroyama, Masanori;Tanaka, Shuji
介绍了一种用于柔性可伸缩母线表面贴装的MEMS-CMOS集成触觉传感器。该传感器的特点是：(1)通过背面刻蚀在CMOS基板上形成传感膜片，(2)将该基板倒装键合到带有Au通孔的特殊低温共烧陶瓷(LTCC)基板上。倒装后的CMOS板和LTCC基板通过Au-Au键合实现了电连接和机械连接，也形成了差分电容间隙。与现有的表面贴装MEMS-CMOS型集成传感器相比，该传感器的结构和制造工艺简单。通过刻蚀沉积在聚酰亚胺基板上的金属制成可弯曲和可拉伸的母线，然后通过激光切割来确定外部形状。这种带有硅胶保护层的公交线路可伸长达50%。覆盖着硅胶的传感器即使在公交线路拉伸10%的情况下也能工作。安装在柔性公交线路表面的触觉传感器从力灵敏度的角度进行了表征。此外，还演示了阈值和自适应操作等智能功能以及传感器参数的配置。(C)2016爱思唯尔B.V.保留所有权利。
This paper describes a MEMS-CMOS integrated tactile sensor for surface mounting on a flexible and stretchable bus line. The sensor is featured by the following configurations; (1) A sensing diaphragm is formed on a CMOS substrate by backside etching, and (2) the CMOS substrate is flip-bonded to a special low temperature cofired ceramic (LTCC) substrate with Au through vias. The flipped CMOS substrate and the LTCC substrate were electrically and mechanically connected using Au-Au bonding, which also formed differential capacitive gaps. The structure and fabrication process are simple compared with the existing surface-mountable MEMS-CMOS integrated sensors. Bendable and stretchable bus lines were fabricated by etching metal, which is deposited on a polyimide substrate and the outer shape is then determined by laser cutting. The bus line with a silicone protection coat is capable of stretching up to 50%. The sensors covered with silicone worked even under 10% stretching of the bus line. The tactile sensors mounted on the surface of the flexible bus line were characterized in terms of force sensitivity. Also, smart functions such as threshold and adaptation operations and the configuration of sensor parameters were demonstrated. (C) 2016 Elsevier B.V. All rights reserved.