An in-wheel type micro ultrasonic motor utilizing sector shaped piezoelectric vibrators
An in-wheel type micro ultrasonic motor utilizing sector shaped piezoelectric vibrators
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DOI:
10.1109/aim.2007.4412536
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发表时间:
2007-12
期刊:
影响因子:
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通讯作者:
T. Kanda;Y. Matsunaga;K. Suzumori
中科院分区:
文献类型:
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作者:
T. Kanda;Y. Matsunaga;K. Suzumori
A micro ultrasonic motor using sector shaped piezoelectric ceramics vibrators has been designed and fabricated. This type micro motor has advantages, such as a high-torque driving, a low-profile, lightweight and compact structure. The outer diameter of vibrator was 9.8 mm, the inner diameter was 5.2 mm, and the thickness was 0.8 mm. The vibrator's 1st longitudinal mode and 2nd bending mode resonance frequency were about 360 kHz. The ultrasonic motor rotated 164 rpm under the condition of an applied voltage of 20 Vp_p.