A self-running standing wave-type bidirectional slider for the ultrasonically levitated thin linear stage
A self-running standing wave-type bidirectional slider for the ultrasonically levitated thin linear stage
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DOI：
10.1109/tuffc.2008.865
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发表时间：
2008-08
期刊：
影响因子：
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通讯作者：
D. Koyama;H. Takei;K. Nakamura;S. Ueha
中科院分区：
文献类型：
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作者：
D. Koyama;H. Takei;K. Nakamura;S. Ueha
讨论了一种用于自运行驻波型超声悬浮薄直线工作台的滑块。利用声辐射力和声流可以使滑块悬浮和移动。该滑块具有简单的构造，并且由铝振动板和压电锆钛酸盐（PZT）元件组成。通过调整有限元分析确定的结构，获得了大的非对称振动分布，以获得高推力和悬浮性能。作为初步的步骤，在1毫米的空气间隙的声压分布的有限元计算结果与使用光纤探头获得的实验结果相一致。通过有限元分析得到的声压分布估计了小间隙中声流的总驱动力的方向，并发现通过控制滑块的振动模式可以改变声流的方向。在有限元分析结果预测的频率附近，可以沿着振动板产生弯曲驻波。滑块可以通过其自身振动板在多个频率下辐射的声辐射力而悬浮。在68 kHz和69 kHz频率下，滑块可以沿正反两个方向移动，这与有限元分析的结果相一致，滑块振动板的振动分布不对称。悬浮距离越小，推力越大，最大推力可达19 mN。
A slider for a self-running standing wave-type, ultrasonically levitated, thin linear stage is discussed. The slider can be levitated and moved using acoustic radiation force and acoustic streaming. The slider has a simple configuration and consists of an aluminum vibrating plate and a piezoelectric zirconate titanate (PZT) element. The large asymmetric vibration distribution for the high thrust and levitation performance was obtained by adjusting the configuration determined by finite elemental analysis (FEA). As a preliminary step, the computed results of the sound pressure distribution in the 1-mm air gap by FEA was com pared with experimental results obtained using a fiber optic probe. The direction of the total driving force for the acoustic streaming in the small air gap was estimated by the sound pressure distribution calculated by FEA, and it was found that the direction of the acoustic streaming could be altered by controlling the vibration mode of the slider. The flexural standing wave could be generated along the vibrating plate near the frequencies predicted based on the FEA results. The slider could be levitated by the acoustic radiation force radiated from its own vibrating plate at several frequencies. The slider could be moved in the negative and positive directions at 68 kHz and 69 kHz, which correspond to the results computed by FEA, with the asymmetric vibration distribution of the slider's vibrating plate. Larger thrust could be obtained with the smaller levitation distance, and the maximum thrust was 19 mN.